Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.18, No.1, 293-295, 2000 Export Citation Ultraviolet light enhancement of Ta2O5 dry etch rates Lee KP, Cho H, Singh RK, Pearton SJ, Hobbs C, Tobin P Keywords:CHEMICAL-VAPOR-DEPOSITION;TANTALUM OXIDE;THIN-FILMS;GATEINSULATOR;PLASMA;FABRICATION;PENTOXIDE;CAPACITOR Please enable JavaScript to view the comments powered by Disqus.
