In this effort the residual strain in exposed negative tone SAL 605 and unexposed positive tone APEX-E resists was characterized for a variety of processing conditions using surface micromachined bent-beam strain sensors fabricated with resist as the structural material. Results showed that SAL 605 is in 1035-1230 mu strain compression, whereas APEX-E is in 653-690 mu strain tension for the conditions tested. Residual stress in APEX-E was also determined by wafer curvature measurements. The ratio of the residual stress to strain at room temperature indicated that the Young＇s modulus of this material is 21+/-5 GPa. The temperature dependence of the stress indicated that the glass transition temperature for APEX-E is 118+/-2 degrees C, and its coefficient of thermal expansion is 11.0+/-2.5 ppm/K.