화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.17, No.6, 2483-2487, 1999
Direct current and pulsed operation of contaminated liquid metal ion sources
Gallium liquid metal ion sources (LMISs) have been exposed to common gas and liquid phase laboratory and vacuum system contaminants. Minor changes in the direct current and pulsed operation of the LMISs were observed after contaminant exposure. Time-of-flight mass analysis of the ion emission revealed that contaminant species are primarily field evaporated with the gallium substrate. Low vapor pressure contaminants have been observed to constitute a significant portion of the total emitted ion current.