화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.17, No.2, 883-887, 1999
Conformal ion implantation using pulsed plasma sources
Operation of plasma implantation equipment at currents of several hundred amperes has been achieved with high density (10(11)-10(12)/cc) pulsed plasma sources. These currents have lead to inferred sheath dimensions in the 1-2 cm range. The equipment, results, and analysis are described here in detail.