For solving the drawbacks of silicon emitters, emitters coated with cobalt silicide were developed in this study. The cobalt silicide emitters showed enhanced emission properties including I-V characteristics and long-term current stability compared to bare silicon emitters. This was mainly caused by a reduction of the effective work function and the formation of a chemically stable surface. However, the electron emission characteristics differed according to the phase and thickness of the cobalt silicide. Detailed results about the effect of the phase and thickness of cobalt silicide on electron emission are discussed.