Journal of Vacuum Science & Technology B, Vol.17, No.2, 592-595, 1999
Comparative study of electron emission characteristics of silicon tip arrays with and without amorphous diamond coating
Details are given of experiments carried out to compare the field electron emission characteristics of single crystal silicon lip arrays with and without amorphous diamond (a-D) coating. The coatings on the tip arrays were prepared using the filtered vacuum ire plasma deposition technique. In addition, the optical and electrical properties of the a-D coatings were measured. An: anode probe technique was employed to measure the current-voltage characteristics and turn-on fields of the tip-array emitters before and after coating. It is found that the coating enhances the emission. The physical reasons for these effects are discussed.
Keywords:FIELD EMITTERS;CARBON