화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.16, No.3, 1516-1519, 1998
Device design and circuit modeling issues in ultrahigh vacuum chemical vapor deposition SiGe heterojunction bipolar transistors
We discuss the physical basis, experimental results, and compact circuit modeling issues associated with neutral base recombination, germanium-ramp effects, and high-injection heterojunction barrier effects in graded-base, silicon-germanium heterojunction bipolar transistors. All three phenomena depend strongly on Ge profile shape and temperature, and are unaccounted for in conventional silicon bipolar transistor compact models such as SPICE.