화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.15, No.6, 2373-2378, 1997
Optimization of experimental operating parameters for very high resolution focused ion beam applications
We report an experimental procedure to optimize the current profile of a focused ion beam probe, with a special emphasis on high resolution applications. The optimized operating conditions are given for three specific cases : specimen thinning for electron microscopy, nanoetching, and nanolithography. We present high quality membranes for transmission electron microscopy, arrays of nanoholes with reproducible dimensions of 17 nm etched on a nickel membrane, and finally nanolithography operations with a 10 nm resolution. Due to the conventional design of our focused ion beam system, the operating conditions that we have established for each nanofabrication application, should be successfully applied to a wide variety of ion columns.