화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.15, No.5, 1773-1774, 1997
Study of Ohmic Contact Resistance to Ga(1-X)in(X)as/InP Composite Channel InP High-Electron-Mobility Transistors for X=35-Percent to X=81-Percent
This article reports the performance of alloyed Ohmic contacts to Ga(1-X)In-(X)As/InP composite channel InP high electron mobility transistors for various indium compositions, from X=35% to X=81%. Both strained and pseudomorphic structures were utilized to observe the impact of the indium concentration on electron mobility, carrier concentration, sheet resistance, and specific contact resistance. The lowest specific contact resistance (Rt<0.16 Ohm mm) was obtained for strained structures with indium concentrations of 74% and 81%. For strained structures with indium concentrations of 35%, we observe specific contact resistance of 0.35 Ohm mm.