화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.15, No.2, 454-456, 1997
Field-Emission of Nitrogen-Doped Diamond-Like Carbon-Films Deposited by Plasma-Enhanced Chemical-Vapor-Deposition
The N doping effect on the electrical conductivity and electron emission property for diamondlike carbon (DLC) films deposited by plasma enhanced chemical vapor deposition (PECVD) has been studied. The electrical conductivity can be widely varied by n-type doping of the DLC. The relationship between the prefactor of conductivity and the conductivity activation energy satisfy the Meyer-Neldel relation : sigma(0) = sigma(00) exp(AE(a)) with A = 19eV(-1) and sigma(00) = 9 x 10(-8) S/cm. The emission current for heavily N doped DLC films is much higher than that of undoped DLC even though the lightly N doped film shows much smaller current.