화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.15, No.2, 446-449, 1997
Emission Characterization of Diamond-Coated Si Field-Emission Arrays
Large-area arrays of Si tips (10(5)-10(6) tips in an array) with diamond coating were tested in pulse and de modes. The arrays demonstrated uniform emission, reproducible I-V plots, and low emission threshold. The maximum current achieved with diamond-coated Si arrays was 80 mA in pulse made. Emission characteristics were found to be superior to the uncoated Si tip arrays or diamond-coated flat cathodes.