화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.14, No.4, 2761-2766, 1996
Solvent Effect on the Properties of Sulfur Passivated GaAs
Photoluminescence and x-ray photoelectron spectroscopy have been used to study the solvent effect on surface properties of GaAs passivated in different sulfide solutions. It has been found that sulfur passivation could be made more efficient by decreasing the solution dielectric constant through the use of various alcohols as solvents. Specifically, the band edge photoluminescence intensity is much higher, the total amount of oxides is lower, and sulfur coverage is higher compared with a GaAs surface treated in an aqueous sulfide solution. The role of the solvent in sulfur passivation is discussed.