화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.14, No.3, 2290-2292, 1996
Growth and Characterization of High-Mobility 2-Dimensional Electron Gases
GaAs/GaAlAs based two-dimensional electron gas structures, with peak mobilities up to 6.4 million (cm(2)/V s), have been grown in a V80H molecular beam epitaxy system. Unlike many systems in which layers with ultra-high mobilities have been grown, this is a general purpose machine with 3 inch wafer capability and is used extensively for a variety of other growth projects. Some of the procedures taken to achieve these high mobilities are presented and some of the special considerations involved in transport characterization are discussed.