화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.14, No.3, 2244-2247, 1996
All-Solid Source Molecular-Beam Epitaxy Growth of GaxIn1-Xasyp1-Y/InP Lasers Using Phosphorus and Arsenic Valved Cracking Cells
Growth of GaxIn1-xAsyP1-y on (001) InP by molecular beam epitaxy employing solid phosphorus and arsenic sources supplied via valved cracking cells was investigated. For growth temperatures between 430-525 degrees C, the incorporation of As and P was found to be strongly dependent upon the Ga mole fraction, substrate temperature, and incident As and P fluxes. The relative incorporation of As and P is nonlinearly related to the incident column V fluxes, with P incorporation being enhanced with increasingly higher growth temperatures. The data show that the quaternary could be grown lattice matched to InP across the entire wavelength range 1.15-1.65 mu m, with strong photoluminescence emission. Heterojunction laser diodes subsequently fabricated with a broad range of emission wavelengths had threshold current densities as low as 1.7 kA/cm(2) with differential quantum efficiencies as high as 28%.