화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.14, No.2, 768-771, 1996
Growth of Copper Nanocrystallites on Copper Seed Cones - Evidence for the Presence of a Liquid-Phase on an Ion-Impacting Cone Surface
The Ar+-sputter-induced "cone evolution" on Mo-seeded Cu is known to entail the growth of hillocklike crystallites on the cone surface, Such crystallites have now been identified as Cu, by means of high-resolution energy dispersive x-ray analysis, The Cu crystallites grew selectively on the Mo lattice of seed layers, and sometimes at the seed-layer apex which suffered from head-on ion impact during sputtering. The crystallite growth was thus not a direct consequence of ion impact, leading to a hypothesis that a viscous overlayer of Cv on the growing Mo lattice condensed into dewdroplike crystallites upon switching off the ion beam.