Journal of Vacuum Science & Technology B, Vol.14, No.1, 465-465, 1996
Papers from the 3rd International Workshop on Advanced Plasma Tools for Etching, Chemical-Vapor-Deposition, and Plasma Vapor-Deposition - Sources, Process-Control, and Diagnostics - 3-4 May 1995 Le-Baron-Hotel, San-Jose, California - Preface