Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 1337-1341, 1995 DOI10.1116/1.587849 Export Citation Nanoscale Scanning Tunneling Microscope Patterning of Silicon Dioxide Thin-Films by Catalyzed HF Vapor Etching Whidden TK, Allgair J, Jenkinsgray A, Kozicki MN Keywords:OXIDE Please enable JavaScript to view the comments powered by Disqus.
