Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 1000-1005, 1995 DOI10.1116/1.587892 Export Citation GaAs Heteroepitaxial Growth on Si Substrates with Thin Si Interlayers in-Situ Annealed at High-Temperatures Yodo T, Tamura M Keywords:STRAINED-LAYER SUPERLATTICES;MOLECULAR-BEAM EPITAXY;REDUCTION;PHOTOLUMINESCENCE;STRESS Please enable JavaScript to view the comments powered by Disqus.