Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 962-966, 1995 DOI10.1116/1.588213 Export Citation Low-Damage Specimen Preparation Technique for Transmission Electron-Microscopy Using Iodine Gas-Assisted Focused Ion-Beam Milling Yamaguchi A, Nishikawa T Please enable JavaScript to view the comments powered by Disqus.