Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 876-880, 1995 DOI10.1116/1.588199 Export Citation Characterization of Thin Sin Film Formed with Electron-Cyclotron-Resonance Nitrogen Plasma Machida K, Hosoya T, Imai K, Arai E Please enable JavaScript to view the comments powered by Disqus.
