Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.2, 653-656, 1995 DOI10.1116/1.587933 Export Citation Low-Temperature Growth of 850-nm Quantum-Well Modulators for Monolithic Integration to Very Large-Scale Integrated Electronics on GaAs Cunningham JE, Goossen KW, Jan WY, Walker JA, Pathak RN Keywords:PLASMA Please enable JavaScript to view the comments powered by Disqus.
