Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.2, 321-326, 1995 DOI10.1116/1.588373 Export Citation Nanometer Metrology by Means of Backscattered Electrons Difabrizio E, Grella L, Gentili M, Baciocchi M, Mastrogiacomo L, Maggiora R Keywords:PROFILE Please enable JavaScript to view the comments powered by Disqus.
