Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 4009-4012, 1994 DOI10.1116/1.587420 Export Citation Deep-Etch X-Ray-Lithography at the Advanced Light-Source - First Results Malek CK, Jackson K, Brennen RA, Hecht MH, Bonivert WD, Hruby J Please enable JavaScript to view the comments powered by Disqus.
