Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3760-3764, 1994 DOI10.1116/1.587438 Export Citation A Novel Technique for Shifter Void Defect Repair by a Focused Ion-Beam Tool Jinbo H, Takushima K, Saito T, Ashida I, Tanaka Y Please enable JavaScript to view the comments powered by Disqus.
