Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3735-3740, 1994 DOI10.1116/1.587433 Export Citation Nanometer-Scale Patterning and Oxidation of Silicon Surfaces with an Ultrahigh-Vacuum Scanning Tunneling Microscope Lyding JW, Abeln GC, Shen TC, Wang C, Tucker JR Keywords:HYDROGEN;DESORPTION;FABRICATION;CHEMISTRY;SI(001) Please enable JavaScript to view the comments powered by Disqus.
