Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3673-3676, 1994 DOI10.1116/1.587637 Export Citation Sub-0.1-Mu-M T-Shaped Gate Fabrication Technology Using Mixing-Layer Sidewalls in a Double-Layer Resist System Samoto N, Miura I, Makino Y, Yamanoguchi K Please enable JavaScript to view the comments powered by Disqus.
