Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3404-3408, 1994 DOI10.1116/1.587521 Export Citation Deflector and Correction Coil Calibrations in an Electron-Beam Block Exposure System Yamada A, Sakamoto K, Yamazaki S, Kobayashi K, Sago S, Oono M, Watanabe H, Yasuda H Please enable JavaScript to view the comments powered by Disqus.
