Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3327-3331, 1994 DOI10.1116/1.587621 Export Citation High-Aspect-Ratio Dry-Etching for Microchannel Plates Snider GL, Then AM, Seave RJ, Tasker GW Keywords:POWER DEVICES;GAAS;INP;MICROWAVE;HOLES Please enable JavaScript to view the comments powered by Disqus.
