Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3145-3148, 1994 DOI10.1116/1.587490 Export Citation Morphology of Anodically Etched Si(111) Surfaces - A Structural Comparison of NH4F Versus HF Etching Houbertz R, Memmert U, Behm RJ Keywords:POROUS SILICON FORMATION;HYDROGEN TERMINATION;DISSOLUTION Please enable JavaScript to view the comments powered by Disqus.