Journal of Vacuum Science & Technology B, Vol.12, No.6, 3095-3102, 1994
Si-Indiffusion and O-Outdiffusion Processes at Si/SiO2/GaAs-Oxides/GaAs Structures - Implications in SiO2 Formation and GaAs Regrowth
Keywords:NATIVE OXIDE;GAAS(100);SURFACE;GROWTH;SEMICONDUCTORS;TECHNOLOGY;REDUCTION;EPITAXY;FILMS;AES