The Adequat Project for Development and Transfer of 0.25 Mu-M Logic Complementary Metal-Oxide-Semiconductor Modules

Dekeersmaecker R; Declerck G; Felix P; Haond M; Hill C; Janssen G; Lorenz J; Maes H; Montree A; Neppl F; Patruno P; Rudan M; Ryssel H; Vandenhove L; Vandervorst W; Vanommen A

Journal of Vacuum Science & Technology B, Vol.12, No.4, 2852-2859, 1994

Dekeersmaecker R, Declerck G, Felix P, Haond M, Hill C, Janssen G, Lorenz J, Maes H, Montree A, Neppl F, Patruno P, Rudan M, Ryssel H, Vandenhove L, Vandervorst W, Vanommen A

The ADEQUAT project [Advanced Developments for Quarter Micron complementary metal-oxide-semiconductor (CMOS) Technologies] is executed by a European consortium under the JESSI/ESPRIT programs. It aims at developing new device structures and process modules for the 0.35 and 0.25 Am CMOS logic technology generations, offering improved performance while meeting the reliability and manufacturability constraints. Several examples of choices illustrating this optimization process are presented together with the overall project organization and roadmap.