화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.12, No.4, 2552-2557, 1994
Investigation of Spontaneous Ordering in GaInP Using Reflectance Difference Spectroscopy
Reflectance difference spectroscopy (RDS) is applied to the study of optical anisotropy in spontaneously ordered GaInP grown by metalorganic chemical-vapor deposition. The degree of ordering in GaInP has been associated previously with a shift of the band-gap energy DELTAE0, and a crystal-field valence-band splitting A(C). Theoretically and experimentally, both quantities are approximately proportional to the square of the order parameter, which varies from 0 to 1 for disordered and perfectly ordered GaInP, respectively. In this study, we examined a number of GaInP layers grown under conditions that yield a wide range of band-gap energies. The main spectral feature in all samples is a bulk-related, asymmetric peak at E0 with a long tail that extends well below E0 and a sharp, high-energy cutoff at E0 + DELTA(C). The intensity of this peak is proportional to square-root DELTAE0 and is therefore linear with the order parameter. By annealing GaInP in PH3/H-2 mixtures, we find that the RD spectral features for energies between E0 + DELTA(C) and 3 eV are mainly surface induced. Evidence for a bulk-related RDS peak at E1 is also found.