Journal of Vacuum Science & Technology B, Vol.12, No.4, 2437-2439, 1994
Investigation of Porous Silicon by Scanning-Tunneling-Microscopy and Atomic-Force Microscopy
The size and distribution of surface features of porous silicon layers have been investigated by scanning tunneling and atomic force microscopy. Pores and hillocks down to 1-2 nm size were observed, with their shape and distribution on the sample surface being influenced by crystallographic effects. The local density of electronic states show a strong increase above 2 eV, in agreement with recent theoretical predictions.