Plasma source ion implantation over a period of 30 min, with actual ion implantation times of approximately 15 s, has been studied. Estimates of steady-state heat diffusion indicate bulk average temperatures of <50-degrees-C. Experimental profiles show nitrogen diffusion up to > 1 mum, indicating surface temperatures of approximately 500-degrees-C. Resultant implantation and diffusion profiles are compared with conventional plasma nitrided samples.