화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.12, No.2, 905-909, 1994
Energy and Angle Distributions of Ions Striking the Spherical Target in Plasma Source Ion-Implantation
Plasma source ion implantation is a process in which a target is immersed in a plasma and a series of large negative-voltage pulses are applied to it to extract ions from the plasma and implant them into the target. A Monte Carlo simulation model is developed to study the energy and angle distributions of ions striking the spherical target for high pressures of the neutral gas. The charge exchange and momentum transfer sections of ion-neutral that depend on the ion energy are taken into account precisely. The energy and angle distributions of A(r)+ at the spherical target during the sheath edge evolution for the different pressures are investigated in detail.