Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.2, 620-621, 1994 DOI10.1116/1.587400 Export Citation Optical Beam-Deflection Scanning Force Microscope with Easy Cantilever-Laser Beam Alignment Sugihara K, Sakai A, Matsuda T, Toyosaki M, Tanaka K, Matsuura A, Tsukada S Please enable JavaScript to view the comments powered by Disqus.