Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.18, No.3, 1045-1047, 2000 DOI10.1116/1.582298 Export Citation A gradational lead screw dry vacuum pump Akutsu I, Matsuoka T, Ozaki M, Kyuko T, Miyashita S, Ozawa T, Naka M, Ohnishi H, Narahara Y, Horikoshi G Please enable JavaScript to view the comments powered by Disqus.
