Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.17, No.1, 322-322, 1999 DOI10.1116/1.581589 Export Citation Determination of metal vapor ion concentration in an argon/copper plasma for ionized physical vapor deposition (vol A16, pg 2198, 1998) Foster JE, Wendt AE, Wang WW, Booske JH Please enable JavaScript to view the comments powered by Disqus.
