화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.16, No.5, 3029-3033, 1998
Symmetry of, and polarized-laser-induced reactions on, Si (111) Cl2 surfaces studied by second-harmonic generation
The surface symmetry of, and the polarized-laser-induced reactions on, Si (111)/Cl-2 surfaces have been studied using second-harmonic generation (SHG). The outermost surface originated SHG signals, generated by 1.1, 1.3 and 2.0 eV probe., show the modified 3 m symmetries enhanced along the [<2(11)over bar>] direction, probably because of a macroscopic asymmetric surface structure along the [<2(11)over bar>] orientation. On the other hand, the SHG signals originated by the direct bulk transition, generated by 1.6 and 1.7 eV probe, show good 3 m symmetries rather reflecting the symmetry of bulk Si. The threshold power densities of the laser-induced Si (111)/Cl reaction showed significant dependence on the pump polarization with respect to the crystal orientation of the sample surface, and no important dependence on that with respect to the plane of incidence.