화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.16, No.2, 810-816, 1998
Quantum well intermixing in material systems for 1.5 mu m (invited)
Precise control over local optical and electrical characteristics across a semiconductor wafer is a fundamental requirement for the fabrication of photonic integrated circuits. Quantum well intermixing is one approach, where the band gap of a quantum well structure is modified by intermixing the well and barrier layers. Here we report recent progress in the development of intermixing techniques for long wavelength applications, discussing two basic techniques. The first is a class of laser disordering techniques which take place in the solid state. The second is a novel intermixing technique involving plasma induced damage. Both techniques enable large band gap shifts to be achieved in standard GaInAsP multiple quantum well laser structures. The potential of both techniques for photonic integration is further demonstrated by the fabrication and characterisation of extended cavity lasers.