화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.15, No.6, 3082-3085, 1997
Low-Temperature Deposition of Epitaxial Titanium Carbide on MgO(001) by Coevaporation of C-60 and Ti
Films of epitaxial titanium carbide were grown on MgO(001) at 400 and 500 degrees C using a novel method based on the co-evaporation of Ti and C-60. Mirrorlike, adhesive films of TiC1-x (0.2