화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.15, No.5, 2537-2541, 1997
Auger-Electron Spectroscopy Analysis of Oxidation-States of Te in Amorphous CdTe Oxide Thin-Films
Amorphous CdTe oxide (alpha-CdTe:O) thin films with different concentrations of oxygen were grown by rf sputtering and analyzed by Auger electron spectroscopy. A slight change of shape in the Cd MNN peak as a function of oxygen content alpha-CdTe:O is observed. This peak resembles the Cd MNN peak of CdTe, at one extreme, and that of CdTeO3, at the other. The Te MNN and the O KLL peaks have similar shapes and lower intensities for alpha-CdTe:O oxygen saturated films than those in CdTeO3. On the other hand, there is a large and gradual difference in shape, intensity, and energy observed in the Te MNN peak among alpha-CdTe:O with low, intermediate, and high concentration of oxygen. Different Te oxidation states, as Te-2 and Te+4, contribute to this change as evidenced by a simulation with combinations of CdTe and of CdTeO3 spectra, or by combinations of alpha-CdTe:O spectra with low and high oxygen content.