화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.15, No.4, 2431-2433, 1997
On the Relation Between Preferential Emission and Bulk Composition in Binary Alloy Sputtering
Under simulated 1 keV Ar ion bombardment at low temperatures, the angular distributions of the steady sputter state of Cu-Ni alloys have been studied with the help of a dynamic Monte Carlo program. Calculations show the preferential emission of Ni in the near-normal direction, but that of Cu at oblique angles. Calculations also show that these preferential emissions strongly depend on the bulk composition.