화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.15, No.4, 2391-2394, 1997
Spinning Rotor Gauge in the Range from 10(-4) to Atmospheric-Pressure
Many industrial applications require measuring pump down pressure trends over several orders of magnitude, in various sensor positions. The SAES Vacuum Gauge (SVG1) senses from 10(-4) Pa to atmospheric pressure with orientation-independent positioning. A temperature sensor was added to the conventional spinning rotor gauge to compensate for the thermal response; new magnets were added to stabilize the levitation. A nonlinear data processing algorithm was developed to stabilize the gauge over the expanded pressure range. The SVG1 range is larger than a traditional spinning rotor gauge (10(-4)-1 Pa), and capacitance manometers (1-10(5) Pa).