The surface of sputtered PbTiO3 thin films, 5-200 nm in thickness, epitaxially grown on miscut (001) SrTiO3 substrates with miscut angle of 1.7 degrees comprised a periodic striped pattern which was reflected in the initial surface structure of the substrates. The electron microscopic analysis suggests that the film growth is governed by a step-flow model which corresponds to Frank-van der Merwe mode. The surface was extremely smooth with surface roughness less than 3 nm for a film thickness of 200 nm. The sputtered films showed a homogeneous microstructure with three-dimensional epitaxy. The deposition on miscut substrates realizes the growth of perfect single crystal perovskite thin films, having full in-plane alignment together with a continuous film through a large area.