화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.14, No.4, 2544-2546, 1996
Surface Flatness of Polished Metal Single-Crystals
The Fizeau interference has been utilized to measure the flatness of a metal single crystal after grinding and polishing by standard techniques. It is postulated that deviations from flatness are due to distortions of flexible abrasive substrates during the grinding step.