A large area c-axis oriented YBa2Cu3O7-x thin film was grown on a 3-in. LaAlO3 substrate using off-axis excimer laser deposition. Substrate rotation and laser beam scan on a target enabled thickness variations less than +/-4% over the 3-in. film. The superconducting transition temperature was 88.4-90.8 K and the critical current density was in excess of 10(6) A/cm(2) at 77 K under the zero magnetic field. The surface was smooth with few outgrowths, and the density of particles was 10(4)/cm(2), which is 1/100 less than that yielded on-axis laser deposition.