화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.14, No.3, 1539-1545, 1996
Chemical Sensors with Catalytic Metal Gates
We first review the principles of gas sensitive field effect devices with catalytic metal gates. A discussion about recent experiments under ultrahigh vacuum conditions is given. More particularly, we consider the properties of the interface between the catalytic metal and the insulator it is evaporated on. A few more of the applied research areas related to these devices are also discussed and some remaining research problems are suggested.