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Journal of Vacuum Science & Technology A, Vol.13, No.6, 3003-3003, 1995
Use of an Inexpensive Solid-State Differential Sensor as a 0-35 Mbar Pressure Gauge
We describe a simple setup that enables a solid state differential pressure sensor, normally designed to operate around 1 atm with a range of 70 mbar (-35/+35 mbar), to operate in high vacuum and act as a 0-35 mbar pressure gauge.