화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.13, No.4, 2271-2274, 1995
The Dependence of the Characteristics of a Rotating-Disk Vacuum Gauge on Disk Sizes and Rotor Speed
The characteristic edge effect loss factor of a rotating disk vacuum gauge has been measured experimentally in hydrogen, helium, nitrogen, and krypton. The results are in good agreement with analytical calculations at low speeds and Monte Carlo calculations at high speeds. The characteristics of the gauge in various unequal size disk configurations measured in nitrogen are also presented.